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SEM Zeiss 1540XB FIB/SEM

Specifications

SEM Zeiss 1540XB FIB/SEM

This is a field emission type scanning electron microscope with x-ray and EBSD detectors for material analysis. The microscope includes:

Specifications

SEM Zeiss 1540XB FIB/SEM

This is a field emission type scanning electron microscope with x-ray and EBSD detectors for material analysis. The microscope includes:

  • Focused ion beam, making it possible to cut and polish samples on the nanometer scale as well as high precision deposition of tungsten, titanium, and silicon dioxide.
  • Can also be used with the Raith Elphy Plus system for electron beam and ion beam lithography.
  • EDX detector for the element analysis included.