The Clean Room designed for ISO Class 5 is equipped with the capability of fabricating electronic devices from micrometer to nanometer scales. Major pieces of equipment include all the steps for lithography from first step of cleaning sample to the last step of analysis and test of device: UV Mask Aligner, SEM, e-beam evaporator, Sputter, probe station, XPS, Mass spectrometer and so on.

Private companies and institutes (departments) from university are welcome to directly access cleanroom facilities and equipment through NanoLab as well as expert advice, consultancy, courses and collaborations involving micro- and nanotechnology. Access to equipment and support can be arranged on an hourly basis or for longer projects.