Instrument specification​:

• Max Force:   18 N
• Min Force:  0.0001 N
• Force Resolution:   0.00001 N
• Frequency Range:   0.001 to 200 Hz
• Dynamic Deformation Range:   ± 0.005 to 10000 µm
• Strain Resolution:   0.1 nm
• Modulus Range:   10^3 to 3×10^12 Pa
• Modulus Precision:   ± 1%
• tan δ Sensitivity:   0.0001
• tan δ Resolution:   0.00001
• Temperature range:  Standard Furnace: -100 to 600°C